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RF Measurement
RF Equipment
About
RF Power Sensors
±1.0% Accuracy
CW
For over three decades, Bird’s 4027 RF Power Sensor families have set the benchmark for precision and reliability in the semiconductor industry.
Supporting continuous wave (CW) signals, the 4027 Series achieves ±1% accuracy at calibrated frequencies and power levels, ensuring precise measurements for critical semiconductor and laboratory applications.
Long-Term Reliability
With a 30-year legacy as the industry standard for plasma-enhanced etching and deposition, these sensors offer dependable performance, minimizing downtime and maintenance costs.
NIST-Traceable Confidence
Calibration traceable to the National Institute of Standards and Technology (NIST) provides assurance in measurement integrity for calibrating RF generators in semiconductor tools—ensuring tight process control and repeatable results across production lines.
Built to Withstand Fab Environments
Rugged and reliable, these sensors are made to endure daily use in cleanroom and production environments without compromising accuracy—delivering lab-grade performance on the fab floor.
Comparing the 4027 Series
Explore the key differences in Bird’s 4027 sensors to find the perfect fit for your continuous wave RF measurement needs.
xx = input connector type, yy = output connector type.
Model Number
Frequency Range
Power Range
Accuracy
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4027A250K-xxyy
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250 kHz to 400 kHz
3 W to 10 kW
±1.0%
@ calibrated frequencies & power levels,
±2% elsewhere
@ calibrated frequencies & power levels,
±2% elsewhere
4027A400K-xxyy
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400 kHz to 550 kHz
3 W to 10 kW
±1.0%
@ calibrated frequencies & power levels,
±2% elsewhere
@ calibrated frequencies & power levels,
±2% elsewhere
4027A800K-xxyy
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800 kHz to 950 kHz
3 W to 10 kW
±1.0%
@ calibrated frequencies & power levels,
±2% elsewhere
@ calibrated frequencies & power levels,
±2% elsewhere
4027A2M-xxyy
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1.5 MHz to 2.5 MHz
3 W to 10 kW
±1.0%
@ calibrated frequencies & power levels,
±2% elsewhere
@ calibrated frequencies & power levels,
±2% elsewhere
4027A4M-xxyy
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4027A12M-xxyy
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10 MHz to 15 MHz
0.3 W to 1 kW
±1.0%
@ calibrated frequencies & power levels,
±2% elsewhere
@ calibrated frequencies & power levels,
±2% elsewhere
4027A10M-xxyy
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4027A25M-xxyy
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4027A35M-xxyy
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35 MHz to 45 MHz
3 W to 7.5 kW
±1.0%
@ calibrated frequencies & power levels,
±2% elsewhere
@ calibrated frequencies & power levels,
±2% elsewhere
4027A60M-xxyy
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4027A100M-xxyy
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4027A150M-xxyy
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150 MHz to 170 MHz
3.75 W to 3.75 kW
±1.0%
@ calibrated frequencies & power levels,
±2% elsewhere
@ calibrated frequencies & power levels,
±2% elsewhere
4027F2M-xxyy
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1.8 MHz to 2.2 MHz
with built-in filtering
with built-in filtering
100 W to 10 kW
±1.0%
@ calibrated frequencies & power levels,
±2% elsewhere
@ calibrated frequencies & power levels,
±2% elsewhere
4027F10M-xxyy
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12 MHz to 15 MHz
with built-in filtering
with built-in filtering
100 W to 10 kW
±1.0%
@ calibrated frequencies & power levels,
±2% elsewhere
@ calibrated frequencies & power levels,
±2% elsewhere
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What’s at Stake?
Inaccurate RF doesn’t just skew data—it compromises your entire process.
In semiconductor manufacturing, tight control over RF power is critical to achieving uniform results, maximizing yield, and maintaining tool-to-tool consistency. When your measurements drift or lack traceability, the risks multiply—miscalibrated generators, unstable processes, and wafers that don’t meet spec.
The Bird 4027 Series delivers ±1.0% accuracy and NIST-traceable calibration, giving engineers the confidence to trust their measurements and keep production on track.
Because in high-precision environments, uncertainty isn’t just inconvenient—it’s costly.
Need a Recalibration?
We've Got You Covered.
Keeping your RF sensors accurate is simple with the Bird Service Center. Just use the link below - quick, simple, and handled by the experts who know your products the best. We'll get your sensor back in action fast, with the confidence you can count on.
In a hurry? Ask about our Expedited services.
