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Maintain Uptime. Maximize Yield. Measure with Confidence.

RF Solutions for Semiconductor

In semiconductor fabs, precision is everything—and RF energy is at the heart of every plasma process. Bird’s RF measurement and monitoring solutions are engineered to thrive in the demanding environments of semiconductor manufacturing.

Whether you're building tools, optimizing throughput, or troubleshooting process drift, Bird brings clarity to your RF power systems so you can focus on what matters: yield, uptime, and performance.

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Where Bird Sensors Fit on the Tool — and Why It Matters

In plasma-enhanced etch and deposition tools, precise RF delivery is critical—but not all measurement points tell the full story. That’s why Bird provides two types of RF sensors, each placed strategically in the tool to give you the clearest picture of what’s really happening.

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Before the Matchbox

50 Ohm Inline Sensors

These sensors are installed upstream, between the RF generator and the match network. They provide accurate forward and reflected power readings in a controlled, 50 ohm environment—ideal for verifying generator output and ensuring the match box is receiving stable power.

After the Match Box

V-I-Phase Sensors

Positioned between the match box and the plasma chamber, these sensors measure voltage, current, and phase—capturing what actually reaches the process. They account for load variations and impedance mismatches that the generator can’t see. This is where true process-side insight begins.

Why It Matters

By measuring at both points, fab engineers can:

  • Validate generator performance and match tuning
  • Detect mismatches or shifts in chamber impedance
  • Ensure consistent RF power is reaching the wafer
  • Diagnose process drift before it impacts yield

Bird gives you visibility where it counts—before problems turn into lost wafers.

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Which RF Solution Is Right For Your Lab or Fab?

From matching and monitoring to calibration and control, Bird helps you solve specific RF challenges with the right tool for every step.

FAQs

Have more questions? Get Expert Help.

Why can't I just rely on the RF generator's power readings?

Why should I use a 0.5% accurate sensor instead of my 3% sensor that I’ve been using for years?

I've been using an old 4421 Bird power meter with my sensors. Does Bird have a newer model?

30+ Years. Billions of Wafers. One Trusted Source.

Bird isn’t new to the semiconductor world—we’ve been the trusted RF measurement standard in this industry for more than three decades. Fab engineers know our name because our tools earn their place on the floor: they work, they last, and they tell the truth when it matters most.

Trusted by fabs and toolmakers who demand precision—here’s why:

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Proven Stability in Harsh Environments

Our sensors and measurement systems are designed to operate reliably in cleanrooms, and RF-intensive toolsets—with minimal drift and long calibration cycles.

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Trusted Accuracy at the Point of Process

Fab teams depend on Bird for the data they use to protect yield and diagnose issues. When you need to know what’s really happening at the chamber, Bird brings clarity.

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Decades of RF Innovation, Focused on You

Bird has been solving complex RF challenges for over 80 years. Our experience spans industries, but our commitment is always the same: to help you measure better, faster, and with complete confidence.