In semiconductor fabs, precision is everything—and RF energy is at the heart of every plasma process. Bird’s RF measurement and monitoring solutions are engineered to thrive in the demanding environments of semiconductor manufacturing.
Whether you're building tools, optimizing throughput, or troubleshooting process drift, Bird brings clarity to your RF power systems so you can focus on what matters: yield, uptime, and performance.
Catch RF changes before they impact yield or wafer quality.
Keep chambers matched and performance consistent.
Identify RF issues faster and cut diagnostic downtime.
In plasma-enhanced etch and deposition tools, precise RF delivery is critical—but not all measurement points tell the full story. That’s why Bird provides two types of RF sensors, each placed strategically in the tool to give you the clearest picture of what’s really happening.
These sensors are installed upstream, between the RF generator and the match network. They provide accurate forward and reflected power readings in a controlled, 50 ohm environment—ideal for verifying generator output and ensuring the match box is receiving stable power.
Positioned between the match box and the plasma chamber, these sensors measure voltage, current, and phase—capturing what actually reaches the process. They account for load variations and impedance mismatches that the generator can’t see. This is where true process-side insight begins.
By measuring at both points, fab engineers can:
Bird gives you visibility where it counts—before problems turn into lost wafers.
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Because what the generator thinks it’s delivering doesn’t always match what actually reaches the plasma.
Between the generator and the chamber, factors like impedance mismatches, cable losses, and drift in the match network can significantly alter the signal.
To get an accurate picture of the RF power at the point of process, measurements need to be taken closer to the chamber—after the match box. This helps identify real process conditions and avoids misinterpreting upstream RF data as final delivery values.
While a 3% sensor may have been sufficient for basic monitoring, higher accuracy becomes critical as processes get more sensitive and tighter control is required. A 0.5% accurate sensor significantly reduces measurement uncertainty, helping you:
Detect smaller variations in RF power that could impact process stability or yield
Make tighter process adjustments with confidence, especially in advanced node manufacturing
Reduce false alarms or misdiagnoses, which can lead to unnecessary tool downtime or component swaps
Another important factor is signal type: most older 3% sensors are limited to continuous wave (CW) signals, whereas Bird’s 0.5% sensors support both CW and pulsed RF. As pulsed RF becomes more common in advanced plasma processes, upgrading ensures you’re equipped to monitor and adapt to future tool requirements.
In short, a 0.5% sensor gives you higher accuracy today and broader capability tomorrow.
Yes—Bird offers a modernized version of the 4421 power meter that maintains compatibility with your existing sensors while delivering improved usability and functionality. The updated unit features:
A clearer, more intuitive display for real-time forward, reflected, and return loss readings. VSWR or reflection coefficient is automatically calculated.
Dual sensor capability enables concurrent measurements of RF power generators.
Large 9.7" graphical color display to see when the power supply has settled before making a measurement.
USB and Ethernet connectivity for easier integration into lab or fab environments
If you're still using the legacy 4421, the newer 4421A model offers a direct upgrade path without needing to overhaul your setup—giving you better performance with the tools you already trust.
Bird isn’t new to the semiconductor world—we’ve been the trusted RF measurement standard in this industry for more than three decades. Fab engineers know our name because our tools earn their place on the floor: they work, they last, and they tell the truth when it matters most.
Trusted by fabs and toolmakers who demand precision—here’s why:
Contact UsOur sensors and measurement systems are designed to operate reliably in cleanrooms, and RF-intensive toolsets—with minimal drift and long calibration cycles.
Fab teams depend on Bird for the data they use to protect yield and diagnose issues. When you need to know what’s really happening at the chamber, Bird brings clarity.
Bird has been solving complex RF challenges for over 80 years. Our experience spans industries, but our commitment is always the same: to help you measure better, faster, and with complete confidence.