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7027
7027, Pulse RF Power Sensor
7027

1% Accurate Precision Pulse Power Sensors for Semiconductor Applications


Superb Accuracy!


7027 Series, RF Pulse Power sensors bring stunning and traceable accuracy to laboratory and semiconductor fab environments. Designed to provide ease of use and reliable data for development and production engineers.

At calibrated frequencies, these sensors are capable of 1% accuracy for measurements of the gated power within a RF pulsed waveform. Calibration is traceable to the National Institute of Standards and Technology (NIST) so you can be confident in the quality and accuracy of the measurements these sensors provide.

PRODUCT FEATURES
  • Time Domain Display
  • Gated power measurements with up to four sets of gates available
  • Capable of ±1% power measurement accuracy over full dynamic range at calibrated frequencies.
  • NIST traceable calibration
  • Harmonic filtering
  • External sync input
  • RF Interlock (optional)
  • Programmable with SCPI command set
BENEFITS
  • With RF generator calibration and verification, these high-accuracy sensors deliver confidence in the RF generator output.
  • Use the VPM3 to log and analyze the RF power data from experimental recipes for more streamlined process development.
  • In-situ processes monitoring allows for real time monitoring of processes at runtime to detect anomalies.
  • Time domain analysis of RF pulse waveforms provide a closer look at high power RF pulses.
PRODUCT SELECTION GUIDE
Model Number Freq. (MHz) Power Range Pulse Rep Rate
7027-1-524001-xxyy 0.4 25 W to 25 kW 10 Hz to 11.25 kHz
7027-1-544601-xxyy 2 10 W to 5 kW 10 Hz to 50 kHz
7027-1-594301-xxyy 13.56 10 W to 10 kW 10 Hz to 100 kHz
7027-1-604801-xxyy 27.12 10 W to 3 kW 10 Hz to 50 kHz
7027-1-615501-xxyy 40.68 75 W to 7.5 kW 100 Hz to 100 kHz
7027-1-624901-xxyy 60 30 W to 6 kW 100 Hz to 11.25 kHz

Connector Options (xxyy): 7/16 DIN, N, HN, LC, QRM and others that are available on request.

Note:
  • The Pulse Power Sensor can measure 4 states within a single pulse.
  • Depending on the rep rate, the minimum state width is approximately 1% of the pulse rep rate period.
  • Depending on the rep rate, the maximum state width is approximately 99% of the pulse rep rate period.
  • For applications with rep rates near the low or high extremes of the spec, consult the user manual for the exact limits.
Downloads:
product specifications:
Item No
7027
Item Name
Precision Pulse Sensor
Measurement Type
Thru-Line Power
Impedance-Nominal
50 Ohms
Power Measurement Accuracy
1% at calibrated frequencies, over entire power range
2% at all other frequencies within sensor bandwidth
VSWR Range
1.0:1 to 2.0:1
Insertion Loss-Max
<0.05 dB
Insertion VSWR-Max
1.05
RF Connectors
QC 7/16 DIN, N, HN, LC, QRM and others that are available on request
Directivity-Min
28 dB
Factory Calibration
NIST Traceable
Recommended Calibration Cycle
6 months
Interface
USB 2.0
Power Supply
Via supplied USB Cable
External Sync Input
TTL High, 2-5V
TTL Low, 0-0.85V
Operating Temperature
+15 to +35 °C (+59 to +95 °F)
Storage Temperature
–20 to +70 °C (–4 to +158 °F)
Humidity-Max
95% maximum (non-condensing)
Altitude-Max
15,000 ft. (4,500 m)
Dimensions-Nominal
6.0” L x 1.9” H x 3.7” W (155 L x 50 H x 95 W mm)
Not Including QC Connectors
Weight-Max
Less than 3 lbs, 1.4 kg
Mechanical Shock and Vibration
Designed to meet MIL-PRF-28800F class 3
EMC
EMC Directive (2004/108/EC) European Standard: EN 61326—Electrical Equipment for measurement, control and laboratory use; EMC Requirements Test Spec (for radiated immunity): EN 61000-4-3—Testing and measurement techniques - 10V/meter
CE Mark
Compliant
RoHS
Compliant
Compatible Devices
Virtual Power Meter (VPM3) software
Standard Accessories
USB Cable
compatible devices: