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RF Measurement
RF Equipment
About
RF Power Sensors
±1% Accuracy Pulse/CW
The 7027 and 7029 Series deliver ±1% accuracy for precise RF power measurement in the most demanding semiconductor applications.
Supporting both Pulsed RF and CW signals, these sensors provide reliable RF data essential for RF generator calibration, process control, tool qualification, and consistent production performance.
Calibration-Grade Accuracy, Fab-Ready Design
With ±1% measurement accuracy, the 7027 and 7029 sensors deliver the precision required for calibrating RF generators in semiconductor tools—ensuring tight process control and repeatable results across production lines.
Get the accuracy you need today—with the reliability your fab demands every day.
Ready for CW Today—and Pulsed RF Tomorrow
Whether your tools run CW systems now or is preparing for pulsed RF tools in the future, the 7027 and 7029 sensors have you covered. With built-in support for both signal types, you get long-term flexibility without needing to reinvest as your technology evolves.
Protect your calibration process—and your budget—with sensors built to grow with your fab.
Built to Withstand Fab Environments
Rugged and reliable, these sensors are made to endure daily use in cleanroom and production environments without compromising accuracy—delivering lab-grade performance on the fab floor.
Engineered for precision, built for the real world of semiconductor manufacturing.
What’s at Stake?
Inaccurate RF doesn’t just skew data—it compromises your entire process.
In semiconductor manufacturing, tight control over RF power is critical to achieving uniform results, maximizing yield, and maintaining tool-to-tool consistency. When your measurements drift or lack traceability, the risks multiply—miscalibrated generators, unstable processes, and wafers that don’t meet spec.
The Bird 7027 and 7029 Series delivers ±1% accuracy and NIST-traceable calibration, giving engineers the confidence to trust their measurements and keep production on track.
Because in high-precision environments, uncertainty isn’t just inconvenient—it’s costly.
Manuals & Datasheets
Download the latest documentation and tools for your device.
Need a Recalibration?
We've Got You Covered.
Keeping your RF sensors accurate is simple with the Bird Service Center. Just use the link below - quick, simple, and handled by the experts who know your products the best. We'll get your sensor back in action fast, with the confidence you can count on.
In a hurry? Ask about our Expedited services.
