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RF Measurement
RF Equipment
About
7037 & 7039-Series Pulse / Continuous Wave Power Sensor
Achieve consistent, lab-grade ±0.5% accuracy across your sensor's full power range. Compact and robust, these sensors are ideal for both legacy applications utilizing CW power or advanced applications utilizing pulsed RF power.
Maintain Process Uniformity and Yield
Accurate RF power measurement is essential for critical plasma processes such as etching and deposition. The 7037 & 7039 Series are Bird’s most precise solutions to date and was developed in direct response to industry demands for tighter process control and most consistent wafer yields.
Manuals & Datasheets
Download the latest documentation and tools for your device.
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The Sensor That Fabs Trust
The 7037 & 7039 Series set a new benchmark in RF power measurement, delivering ±0.5% accuracy for both CW and pulsed signals with twice the precision of the 7027 Series.
Trusted by leading semiconductor fabs for their most critical applications, these sensors combine industry-best accuracy with NIST-traceable calibration to deliver unmatched process control. When yield, uptime, and confidence matter most, choose the 7037 Series.
