5 kW, DC to 28 MHz Precision RF Load
8921SC13, 13.56 MHz Ultra Stable Oil-Dielectric RF Termination
For maximum process repeatability and consistency, modern plasma applications require precise RF power regulation and control. A key component in ensuring accurate & repeatable RF power delivery to the chamber is calibration, regulation & monitoring of the RF generator. Bird now offers ultra-stable, low VSWR loads for quick and precise measurement of generator power output when used with precision power sensors such as the Bird 4020 series. The 8921SC13 not only provide low VSWR but also less than 0.1 dB total change in VSWR at process critical frequencies. There is no need for load warm-up or risk of repeatability due to calibration for different lengths of time. This can minimize the errors associated with this calibration and control one of the more critical process variables.
Item Name
5 kW, Ultra Stable, Oil-Dielectric RF Termination Load
Frequency Range and VSWR
DC to 28 MHz @ 1.1 max.
VSWR less than 1.05:1
VSWR Stability
< 0.1 dB, from 0 to 100% rated power at stability frequency
Stability Frequency
13.56 MHz ± 10 kHz
Connectors
"QC" Type LC (Female) - normally supplied
Interlock Thermoswitch - Optional
Normally closed. Opens at 236 °C (457 °F)
Thermoswitch Rating
115 VAC, 10 A
230 VAC, 5 A
Temperature Range
Operating: +5 to +40 °C (+41 to +104 °F)
Storage: – 40 to +45 °C (– 40 to +113 °F)
Altitude
1520 m (5000 ft.)
Humidity
95% noncondensing max.
Cooling Method
Oil dielectric and convection currents
Dimensions
32.8" x 9.5" x 26.9"
832 x 241 x 681 mm