Bird - The RF Experts

1 KW, DC to 28 MHz Precision RF Load

8865SC13, 13.56 MHz Ultra Stable Oil-Dielectric RF Termination
For maximum process repeatability and consistency, modern plasma applications require precise RF power regulation and control. A key component in ensuring accurate & repeatable RF power delivery to the chamber is calibration, regulation & monitoring of the RF generator. Bird now offers ultra-stable, low VSWR loads for quick and precise measurement of generator power output when used with precision power sensors such as the Bird 4020 series. The 8865SC13 not only provide low VSWR but also less than 0.1 dB total change in VSWR at process critical frequencies. There is no need for load warm-up or risk of repeatability due to calibration for different lengths of time. This can minimize the errors associated with this calibration and control one of the more critical process variables.

SC13 Series, RF Termination Graph
product specifications:
Item No
Item Name
1 kW, Ultra Stable, Oil-Dielectric RF Termination Load
Power Rating
1 kW
Frequency Range and VSWR
DC to 28 MHz @ 1.1 max.
VSWR less than 1.05:1
Impedance Ω
50 (nominal)
VSWR Stability
< 0.1 dB, from 0 to 100% rated power at stability frequency
Stability Frequency
13.56 MHz ± 10 kHz
"QC" Type LC (Female) - normally supplied
Interlock Thermoswitch - Optional
Normally closed. Opens at 236 °C (457 °F)
Thermoswitch Rating
115 VAC, 10 A
230 VAC, 5 A
Temperature Range
Operating: +5 to +40 °C (+41 to +104 °F)
Storage: – 40 to +45 °C (– 40 to +113 °F)
1520 m (5000 ft.)
95% noncondensing max.
Cooling Method
Oil dielectric and convection currents
19.5" x 7.5" x 13.2"
496 x 184 x 334 mm
32 lbs.
14.5 kg
Black Epoxy Resin
PMX-200, Silicone Oil