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RF Measurement
RF Equipment
RF Calibration Carts for Semiconductor Fabs
Bird RF calibration carts are mobile systems for calibrating RF generator power in semiconductor fabs. Each cart combines high-accuracy RF power sensors, a 4421A Meter, and an RF load in a cleanroom-compatible platform.
Choose the SCC7 for a single-sensor configuration or the MSCC7 for two pre-installed sensors. Bring your calibration equipment directly to the tool to support preventive maintenance across your fab.
Compare RF Calibration Carts
Choose a single- or dual-sensor configuration, then explore sensor, load, and connector options for your application.
Single Sensor
Calibration Cart
The SCC7 integrates one high-accuracy Bird RF power sensor, a 4421A Meter, and an RF load in a mobile, cleanroom-compatible platform.
Choose the SCC7 when one sensor covers the frequency and power ranges you need to calibrate.
Dual Sensor
Calibration Cart
The MSCC7 integrates two high-accuracy Bird RF power sensors, a 4421A Meter, and an RF load in a mobile, cleanroom-compatible platform.
Choose the MSCC7 when your RF generators require different sensor ranges and you want both sensors installed on one cart.
What's At Stake?
Keep RF Power Calibration on Schedule
RF generator output that drifts outside specified limits can affect process consistency in semiconductor manufacturing. Regular power calibration helps maintenance teams identify deviations and verify performance before returning equipment to production.
Bird calibration carts bring sensors, a meter, and an RF load directly to the tool, supporting scheduled checks across your fab.
Need help choosing a configuration? Bird’s applications team can help match sensor frequency ranges, power levels, loads, and connectors to your RF generators.
Get the Right RF Calibration Cart for Your Fab
Tell us your RF generator frequencies, power levels, and connector requirements. Bird’s team can help you select an SCC7 or MSCC7 configuration and provide a quote for your application.
