Highly accurate power measurement for laboratory and semiconductor production processes

The Bird Diagnostic System (BDS2) simultaneously measures and reports voltage, current, and phase angle at multiple fundamental, harmonic and intermodulation frequencies.

Calibration Carts are suitable for use in a clean room environment and is equipped with four swivel casters for maximum maneuverability.

4421A Series, Multifunction Power Meters used in combination with Bird’s Precision Power Sensors to display RF power readings with up to 1% accuracy.

Power measurements with 0.5% or 1% accuracy - Continuous Wave (CW) or Pulse.  
First-to-market, traceable measurement accuracy to applications requiring precise RF power measurement, such as in the semiconductor, medical and laser industries.

Power Measurements with 1%, 2% or 3% accuracy – Continuous Wave (CW). 
Providing highly accurate power measurement of laboratory and semiconductor production processes.

For maximum process repeatability and consistency, modern plasma applications require precise RF power regulation and control.