Bird - The RF Experts
Precision RF Products

Highly Accurate Power Sensors and VI Probes for Process Monitoring and Control

Experience several benefits of utilizing Bird’s Precision RF Products:

  1. Improved Consistency: Optimize the uniformity of your RF power delivery.
  2. Reliable Accuracy: Trust in the results with industry leading measurement uncertainties.
  3. Streamlined Measurement: Simplify your workflow with turnkey calibration carts.
  4. Deeper Insights: Gain valuable understanding of complex impedance processes through the BDS system.
  5. Trusted Provider: Rely on Bird's proven track record as the semiconductor industry’s RF measurement standard.

View 2023 Semiconductor Brochure

Diagnostic Systems

The Bird Diagnostic System (BDS2) simultaneously measures and reports voltage, current, and phase angle at multiple fundamental, harmonic and intermodulation frequencies.

Calibration Carts

Calibration Carts are suitable for use in a clean room environment and is equipped with four swivel casters for maximum maneuverability.

Power Meters

4421A Series, Multifunction Power Meters used in combination with Bird’s Precision Power Sensors to display RF power readings with up to 1% accuracy.

Precision CW & Pulse RF Sensors

Power measurements with 0.5% or 1% accuracy - Continuous Wave (CW) or Pulse.  
First-to-market, traceable measurement accuracy to applications requiring precise RF power measurement, such as in the semiconductor, medical and laser industries.

Precision CW RF Sensors

Power Measurements with 1%, 2% or 3% accuracy – Continuous Wave (CW). 
Providing highly accurate
power measurement of laboratory and semiconductor production processes.

Ultra Stable Oil-Dielectric RF Termination Loads

For maximum process repeatability and consistency, modern plasma applications require precise RF power regulation and control.