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7037 Series
7027, Pulse RF Power Sensor
7037 Series

0.5% Accurate Precision Pulse Power Sensors for Semiconductor Applications


Superb Accuracy!


7037 Series, RF Pulse Power Sensors bring stunning and traceable accuracy to laboratory and semiconductor fab environments. Designed to provide ease of use and reliable data for development and production engineers.

At calibrated frequencies, these sensors are capable of 0.5% accuracy for measurements of the gated power within a RF pulsed waveform. Calibration is traceable to the National Institute of Standards and Technology (NIST) so you can be confident in the quality and accuracy of the measurements these sensors provide.

PRODUCT FEATURES
  • Time Domain Display
  • Average power measurement of up to 4 states within multilevel pulses
  • Capable of ±0.5% power measurement accuracy over full dynamic range at calibrated frequencies.
  • NIST traceable calibration
  • Harmonic filtering
  • External sync input
  • RF Interlock (optional)
  • Programmable with SCPI command set
BENEFITS
  • With RF generator calibration and verification, these high-accuracy sensors deliver confidence in the RF generator output.
  • Use the VPM3-MSP Software to log and analyze the RF power data from experimental recipes for more streamlined process development.
  • In-situ processes monitoring allows for real time monitoring of processes at runtime to detect anomalies.
  • Time domain analysis of RF pulse waveforms provide a closer look at high power RF pulses.

PRODUCT SELECTION GUIDE (Launching in 2020)

Model Number Freq. (MHz) Power Range Pulse Rep Rate
7037-1-524001-xxyy 0.4 25 W to 25 kW 10 Hz to 11.25 kHz
7037-1-544301-xxyy 2 10 W to 10 kW 10 Hz to 50 kHz
7037-1-595701-xxyy 13.56 100 W to 10 kW 100 Hz to 100 kHz
7037-1-604401-xxyy 27.12 90 W to 9 kW 100 Hz to 100 kHz
7037-1-615501-xxyy 40.68 75 W to 7.5 kW 100 Hz to 100 kHz
7037-1-625801-xxyy 60 60 W to 6 kW 100 Hz to 100 kHz

 

Connector Options (xxyy): 7/16 DIN, N, HN, LC, QRM and others that are available on request.

Note:
  • The Pulse Power Sensor can measure 4 states within a single pulse.
  • Depending on the rep rate, the minimum state width is approximately 1% of the pulse rep rate period.
  • Depending on the rep rate, the maximum state width is approximately 99% of the pulse rep rate period.
  • For applications with rep rates near the low or high extremes of the spec, consult the user manual for the exact limits.
7027, Pulse RF Power Sensor
7037 Series
product specifications:
Item No
7037 Series
Item Name
Precision Pulse Sensor
Measurement Type
CW and Multi-State Pulsed RF Power
Power Measurement Accuracy
0.5% at calibrated frequencies
1.5% at all other frequencies within sensor bandwidth
Directivity
28 dB (min)
VSWR Range
1.0:1 to 2.0:1
Insertion Loss
<0.05 dB
Insertion VSWR
1.05
Impedance
50 Ohms
RF Connectors
QC 7/16 DIN, N, HN, LC, QRM and others that are available on request
System
Recommended Calibration Interval: 6 months
Interface: USB 2.0
Power Supply: Via supplied USB Cable
External Sync Input: TTL High, 2-5V; TTL Low, 0-0.85V
Compatible With: Virtual Power Meter (VPM3-MSP) Software
Environmental
Temperature
Operating: 15 to 35 °C (59 to 95 °F)
Storage: -20 to 70 °C (-4 to 158 °F)

Humidity: 95% maximum (non-condensing)
Altitude: 15,000 ft max (4,500 m max
Physical
Size:6.0" x 1.9" x 3.7" (155 x 50 x 95 mm)
Not including QC connectors

Weight: Less than 3 lb, 1.4 kg
Certifications
Mechanical Shock and Vibration: Designed to meet MIL-PRF-28800F class 3

EMC
EMC Directive (2004/108/EC)
European Standard: EN 61326—Electrical Equipment for measurement, control and laboratory use; EMC Requirements
Test Spec (for radiated immunity): EN 61000-4-3—Testing and measurement techniques - 10V/meter

CE Mark: Compliant
RoHS: Compliant