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7001A900-2, Bird Diagnostic System
BDS2
7001A900-2, Bird Diagnostic System

Inline VI Probe Technology


The Bird Diagnostic System (BDS2) is a revolutionary tool for measuring voltage and current in complex applications

Where repeatability of sensitive RF measurements is important, such as during the processing of silicon wafers, the BDS2 provides never-before seen data. Each system is comprised of a sensor that attaches in-situ in the RF feed line, a receiver that performs the data conversion and communicates to your workstation, and a calibrated data cable that connects the sensor and receiver. With the ability to make measurements post-matchbox, the BDS2 uncovers signal characteristics that are not visible to traditional test equipment pre-matchbox.

Using sophisticated parallel signal processing, the BDS2 is able to simultaneously measure and report voltage, current, and phase angle at multiple fundamental, harmonic and intermodulation frequencies. A robust frequency tracking algorithm is employed to guarantee accurate measurements are made under very dynamic signal conditions. With this data, power and impedance are calculated at each frequency, giving users the ability to identify small discrepancies that may make the difference between a successful and a failed process. This makes the BDS2 an incredible tool for researching new RF technologies and repeating high precision processes. The BDS2 is compatible with existing BDS sensor and cable installations.

The optional Time-Domain mode allows unprecedented visibility into the shape of pulsed RF waveforms in the non 50-Ohm environment. Very similar to an oscilloscope, the BDS2 will display a one-shot, triggered view of the pulse envelope. Very different from an oscilloscope, the BDS2 will display the waveform in voltage, current, phase, power, or impedance to the fully-specified accuracy of the system.

Features

  • Up to 3 fundamental frequencies can be measured simultaneously with a single BDS2 system. This feature aids in developing repeatable processes, troubleshooting components and identifying process drifts.
  • High-speed pulse tracking enables the BDS2 to make measurements under simple or complex pulse conditions, providing unprecedented visibility into process performance.

Application

  • Chamber to Chamber Matching
  • Impedance Matching can reveal problems such as poor RF connections, worn electrodes and changes in the process gas mixture
  • Harmonic Levels up to 252 MHz are available for analysis
  • V, I, Phase and Delivered Power Comparison
BDS2
7001A900-2, Bird Diagnostic System
product specifications:
Item No
7001A900-2, Bird Diagnostic System
Item Name
Inline VI Probe
Frequency
Range: 307 kHz - 252 MHz (Sensor Dependent)
Resolution: 100 Hz
Accuracy: ± 1 kHz
Number of Fundamentals
Up to 3 simultaneously. For more than 1 fundamental, choose from the following: 0.4, 13.56, 160.0 MHz; 0.4, 60.0 MHz; 1.0, 13.56 MHz; 2.0, 27.12, 60.0 MHz; 3.2, 40.68 MHz; 3.2, 60.0 MHz; 12.88, 40.68 MHz; 13.56, 100.0 MHz
(Contact factory for a custom designed sensor and custom frequency combinations)
Harmonics
4 harmonics per fundamental, 6 intermodulation products per pair of fundamentals, up to 252 MHz. Limited by maximum number of measurement channels (12 in standard mode, 6 in time domain mode)
Measurements
Voltage, current, phase, frequency, impedance, power at frequencies selected by user
Update Rates
100 Hz (typ)
Network Protocol - Future Enhancements
Ethernet (DeviceNet, EtherCAT)
RF Power
Determined by RF sensor, (typically 10kW or higher)
RF Connectors
Custom or QC
Operating Modes
Tracking Mode, Spectral Search Mode
Tracking Characteristics
Frequency Slew Rate: 2 GHz/sec
Minimum Pulse Width: 5 μsec
Time Domain Mode
Time Resolution: 500ns
Configurable Time Scale: 0.1 to 10 ms
Average: Trace Average
Trigger: Voltage or current waveform
Rising or falling edge
External triggering
Upper/lower thresholds, and holdoff
Pre- and post-trigger buffer: 5% to 95%
Temperature
Receiver Operating: +20 to +40 °C (68 to 104 °F)
Receiver Storage: -20 to +80 °C (-4 to +176 °F)
Cable Operating: 0 to +100 °C (32 to 212 °F)
Cable Storage: -20 to +100 °C (-4 to 212 °F)
Sensor Operating/Storage: Refer to Sensor Specification
Humidity
85% Non-condensing
Air Pressure
745 mbar (equivalent to 2,500 m / 8,200 ft. max altitude)
Operating Power
15VDC, 2.5A nominal
System Components
Receiver (Unlocked System)
7001A900-2 - BDS2 Single Ch. Receiver/Ethernet

Calibrated Data Cable Options (Unlocked System)
7001B040-5M - RF/Data Cable Set, 5M straight

Sensor Options* (Unlocked System)
7001A550-1-XXYY - Sensor, BDS2, QC Connector (Choose XX YY connector options)

Input (XX) & output (YY) connector options:
01 – QC N (F)     02 – QC N (M)     12 – QC HN (F)
13 – QC HN (M)     14 – QC 7/16 (F)     15 – QC 7/16 (M)
Other connector options available upon request

7001A550-2 - Sensor, BDS2, Protruding Dielectric

Kits (Locked System)
7001A500-1-XX YY - BDS2 Kit, QC Connectors(Choose XX YY connector options)

Input (XX) & output (YY) connector options:
01 – QC N (F)     02 – QC N (M)     12 – QC HN (F)
13 – QC HN (M)     14 – QC 7/16 (F)     15 – QC 7/16 (M)
Other connector options available upon request

7001A500-1-2 - BDS2 Kit, Prodtruding Dielectric Connection

Time Domain Measurement
7001A993-1 - Factory Install License
7001A993F-1 - Field Install License