Bird - The RF Experts
7027 Series
7027, Pulse RF Power Sensor
7027 Series

1% Accurate Precision CW & Pulse Power Sensors


Superb Accuracy!


The 7027 Series in-line RF Power Sensor brings first-to-market, traceable measurement accuracy to applications requiring precise RF power measurement, such as in the semiconductor, medical and laser industries. Bird's advanced CW & Pulse sensors, minimize RF process variability, improve plasma chamber-to-chamber matching and provide critical insight in your RF delivery system.

Highest Accuracy Across the Operating Range
With Bird's cutting-edge, calibration technology, 1% accuracy is guaranteed across the dynamic range, ensuring unit-to-unit repeatability and reducing process variability.

CW & Pulse Power Measurements without Switching Modes
Regardless of whether you are using CW or Pulsed RF, both measurements are automatically displayed using Bird’s power meter without the need for switching modes.

Multilevel Pulse Measurements
Customize your complex process recipe measurements with up to 4 intervals within each pulse.

PRODUCT FEATURES
  • Time Domain Display
  • NIST traceable calibration
  • Harmonic filtering
  • External sync input
  • RF Interlock (optional)
  • Programmable with SCPI command set
BENEFITS
  • With RF generator calibration and verification, these high-accuracy sensors deliver confidence in the RF generator output.
  • Use the VPM3 to log and analyze the RF power data from experimental recipes for more streamlined process development.
  • In-situ processes monitoring allows for real time monitoring of processes at runtime to detect anomalies.
  • Time domain analysis of RF pulse waveforms provide a closer look at high power RF pulses.
PRODUCT SELECTION GUIDE
Model Number Freq. (MHz) Power Range Pulse Rep Rate
7027-1-524001-xxyy 0.4 ± 10% 25 W to 25 kW 10 Hz to 11.25 kHz
7027-1-544601-xxyy 2.0 ± 10% 10 W to 5 kW 10 Hz to 50 kHz
7027-1-594301-xxyy 13.56 ± 5% 100 W to 10 kW 100 Hz to 100 kHz
7027-1-604801-xxyy 27.12 ± 5% 10 W to 3 kW 100 Hz to 100 kHz
7027-1-615501-xxyy 40.68 ± 5% 75 W to 7.5 kW 100 Hz to 100 kHz
7027-1-624901-xxyy 60.0 ± 5% 30 W to 6 kW 100 Hz to 100 kHz

Connector Options (xxyy): 7/16 DIN, N, HN, LC, QRM and others that are available on request.

Note:
  • The Pulse Power Sensor can measure 4 states within a single pulse.
  • Depending on the rep rate, the minimum state width is approximately 1% of the pulse rep rate period.
  • Depending on the rep rate, the maximum state width is approximately 99% of the pulse rep rate period.
  • For applications with rep rates near the low or high extremes of the spec, consult the user manual for the exact limits.
7027, Pulse RF Power Sensor
7027 Series
product specifications:
Item No
7027 Series
Item Name
Precision Pulse Sensor
Measurement Type
CW and Multi-State Pulsed RF Power Sensor
Power Range
360 kHz to 63 MHz, Sensor Dependent
Power Measurement Accuracy
1% at calibrated frequencies, over entire power range
2% at all other frequencies within sensor bandwidth
Impedance
50 Ohms
VSWR Range
1.0:1 to 2.0:1
Insertion Loss
<0.05 dB (max)
Insertion VSWR
1.05 (max)
Directivity
28 dB (min)
Calibration
NIST Traceable
RF Connectors
QC 7/16 DIN, N, HN, LC, QRM and others that are available on request
System
Recommended Calibration Interval: 6 months
Interface: USB 2.0
Power Supply: Via supplied USB Cable
External Sync Input: TTL High, 2-5V; TTL Low, 0-0.85V
Compatible With: Virtual Power Meter (VPM3-MSP) Software
Environmental
Temperature
Operating: 15 to 35 °C (59 to 95 °F)
Storage: -20 to 70 °C (-4 to 158 °F)

Humidity: 95% maximum (non-condensing)
Altitude: 15,000 ft max (4,500 m max)
Physical
Size: 6.0" x 1.9" x 3.7" (155 x 50 x 95 mm)
Not including QC connectors

Weight: Less than 3 lb, 1.4 kg
Certifications
Mechanical Shock and Vibration: Designed to meet MIL-PRF-28800F class 3

EMC
EMC Directive (2004/108/EC)
European Standard: EN 61326—Electrical Equipment for measurement, control and laboratory use; EMC Requirements
Test Spec (for radiated immunity): EN 61000-4-3—Testing and measurement techniques - 10V/meter

CE Mark: Compliant
RoHS: Compliant