Bird - The RF Experts
4027F Series
4027 Series, Precision Filtered RF Power Sensors
4027F Series

Filtered RF Power Sensors for semiconductor processing and other precision process applications


4027F Series, RF Power Sensors are designed specifically for use in semiconductor processing and other precision process applications where the effects of amplitude modulation and harmonics need to be eliminated from the measurement. At the calibrated frequency and power level, these sensors are capable of 1% accuracy. With calibration traceable to the National Institute of Standards and Technology,you can be confident of the measurements these sensors provide.

Model Selections

Model Power Range Frequency
4027F2M 100W - 10kW 1.8 - 2.2 MHz
4027F10M 100W - 10kW 12 - 15 MHz
4027F60M 100W - 6kW 57 - 63 MHz

 

4027 Series, Precision Filtered RF Power Sensors
4027F Series
compatible devices:
4421
RF Power Meter
4421-038
Latch-N-Lok Interface Cable