Bird - The RF Experts
Semiconductor Products

Highly accurate power measurement for laboratory and semiconductor production processes


Bird Laboratory Grade RF Products range from our 4020 Series RF power sensors capable of 3% accuracy to the advanced 4027 Series RF power sensors capable of 1% accuracy. These highly accurate sensors have also been integrated into turnkey calibration carts that integrate all the components required to measure, display and dissipate power from RF delivery systems. Even more sophisticated systems, the VIP and BDS have been developed to not only measure voltage and current but also the phase relationships between them to enable a higher degree of insight into modern, complex semiconductor processes.

Diagnostic Systems

The Bird Diagnostic System (BDS2) simultaneously measures and reports voltage, current, and phase angle at multiple fundamental, harmonic and intermodulation frequencies.

Calibration Carts

Calibration Carts are suitable for use in a clean room environment and is equipped with four swivel casters for maximum maneuverability.

Power Meters

4421A Series, Multifunction Power Meters used in combination with Bird’s Precision Power Sensors to display RF power readings with up to 1% accuracy.

Precision CW & Pulse RF Sensors

Power measurements with 0.5% or 1% accuracy - Continuous Wave (CW) or Pulse.  
First-to-market, traceable measurement accuracy to applications requiring precise RF power measurement, such as in the semiconductor, medical and laser industries.

Precision CW RF Sensors

Power Measurements with 1%, 2% or 3% accuracy – Continuous Wave (CW). 
Providing highly accurate
power measurement of laboratory and semiconductor production processes.

Ultra Stable Oil-Dielectric RF Termination Loads

For maximum process repeatability and consistency, modern plasma applications require precise RF power regulation and control.