Inline Voltage & Current Probe
Identify & Minimize RF Process Variability
Using sophisticated parallel signal processing, the BDS2 simultaneously
measures and reports voltage, current, and phase angle at multiple
fundamental, harmonic and intermodulation frequencies.
A robust frequency tracking algorithm guarantees accurate measurements
under dynamic signal conditions. With this data, power and
impedance are calculated at each frequency, giving users the ability
to identify small discrepancies that may make the difference between
a successful and a failed process.
The optional Time-Domain mode allows exceptional visibility into the
shape of pulsed RF waveforms in the non-50 ohm environment. Similar
to an oscilloscope, the BDS2 will display a one-shot, triggered view
of the pulse envelope. Uniquely, however, the BDS2 will display the
waveform in voltage, current, phase, power, or impedance to the fullyspecified accuracy of the system.
PRODUCT FEATURES
- 1% accurate measurement of RF voltage and current with a locked system
- Calculated impedance, RF power
- Multi-level pulse or CW waveforms
- 1-3 fundamental frequencies
- 4 harmonics per fundamental frequency
- 6 intermodulation products per fundamental pair
- Time-domain mode
- Tracking & Spectral search mode
- Ethernet enabled
APPLICATIONS
- Chamber to chamber matching
- RF process monitoring
- Impedance matching
- Troubleshooting RF delivery system
- Identify process drifts
- Harmonic levels up to 252 MHz are available for analysis
- Voltage, current, phase and delivered power comparison
CONNECTION OPTIONS*
| Input Connector (xx) |
Output Connector (yy) |
| 01 = N(f) |
01 = N(f) |
| 02 = N(m) |
02 = N(m) |
| 12 = HN(f) |
12 = HN(f) |
| 13 = HN(m) |
13 = HN(m) |
| 14 = 7/16(f) |
14 = 7/16(f) |
| 15 = 7/16(m) |
15 = 7/16(m) |
| 34 = LC(f) |
34 = LC(f)
|
| 35 = LC(m) |
35 = LC(m) |
* Custom designs can be developed to fit specific connections/applications. See P-CVD BDS2 Sensor datasheet in downloads section below.
Item Name
Inline Voltage & Current Probe
System Components - Unlocked System
Receiver: 7001A900-2, BDS2 Single Ch. Receiver w/Ethernet
Calibrated Data Cable: 7001B040-5M, RF/Data Cable Set 5 M straight
Sensor Options
(Contact factory for a custom designed sensor and custom frequency combinations)
7001A550-1-xx yy, Sensor, BDS2, QC Connectors
(Choose xx yy options from the Connection Options table above)
7001A550-2, Sensor, BDS2, Protruding Dielectric Connection
System Kits - Locked System
7001A500-1-xxyy, BDS2 Kit (Receiver, Cable and Sensor Kit), QC Connectors
(Choose xx yy options from the Connection Options table above)
7001A500-1-2, BDS2 Kit (Receiver, Cable and Sensor Kit), Protruding Dielectric Connection
System Profiles
Please see datasheet
Time Domain Measurement Options
7001A993-1, Factory Install License
7001A993F-1, Field Install License
Time Domain Measurement Mode
Time Resolution: 500 ns
Configurable Time Scale: 0.1 to 10 ms
Average: Trace Average
Trigger
Voltage or current waveform
Rising or falling edge
External triggering
Upper/lower thresholds
Holdoff
Pre- and Post- Trigger Buffer: 5% to 95%
Measurements
Voltage, current, phase, frequency, impedance, power at frequencies selected by user
Frequency
Range: 307 kHz - 252 MHz (Sensor Dependent)
Resolution: 100 Hz
Accuracy: ± 1 kHz
Number of Fundamentals
Up to 3 simultaneously. For more than 1 fundamental, choose from the following
(or contact the factory for custom combinations):
- 0.4, 13.56, 160 MHz
- 0.4, 60 MHz
- 1, 13.56 MHz
- 2, 27.12, 60 MHz
- 3.2, 40.68 MHz
- 3.2, 60 MHz
- 12.88, 40.68 MHz
- 13.56, 100 MHz
Tracking
Frequency Slew Rate: 2 GHz/sec
Minimum Pulse Width: 5 μsec
Number of Harmonics
4 harmonics per fundamental
6 intermodulation products per pair of fundamentals up to 252 MHz
Limited by the maximum number of measurement channels
Tracking & Spectral search mode
12 harmonics standard mode
6 in time domain mode
Update Rates
100 Hz typical
RF Power Max
Determined by RF sensor, (Typically 10kW or higher)
Operating Modes
Tracking mode, Spectral Search mode
Receiver
Temperature
Operating: 20 to 40 °C (68 to 104 °F)
Storage: -20 to 80 °C (-4 to 176 °F)
Cable
Temperature
Operating: 0 to 100 °C (32 to 212 °F)
Storage: -20 to 100 °C (-4 to 212 °F)
Sensor
Operating/Storage Temperature
Refer to sensor specification
Humidity
85% maximum (non-condensing)
Air Pressure
745 mbar (equivalent to 2,500 m/ 8,200 ft max altitude)
Power
15 VDC, 2.5 A nominal