Bird - The RF Experts
Ultra Stable Oil-Dielectric RF Termination Loads
SC13 Series, 13.56 MHz Ultra Stable Loads
Ultra Stable Oil-Dielectric RF Termination Loads

For maximum process repeatability and consistency, modern plasma applications require precise RF power regulation and control. A key component in ensuring accurate & repeatable RF power delivery to the chamber is calibration, regulation & monitoring of the RF generator. Bird now offers ultra-stable, low VSWR loads for quick and precise measurement of generator power output when used with precision power sensors such as the Bird 4020 series. Bird® models 8865SC13, 8890-300SC13, 8921SC13 and 8931 SC models not only provide low VSWR but also less than 0.1 dB total change in VSWR at process critical frequencies. There is no need for load warm-up or risk of repeatability due to calibration for different lengths of time. This can minimize the errors associated with this calibration and control one of the more critical process variables.

SC13 Series, 13.56 MHz Ultra Stable Loads
Ultra Stable Oil-Dielectric RF Termination Loads
Check up to five products to compare
Item No
Item Name
Power Rating
Frequency Range and VSWR
Interface Specs Ω
1 kW, Ultra Stable, Oil-Dielectric RF Termination Load
1 kW
DC to 28 MHz @ 1.1 max.
VSWR less than 1.05:1
50 (nominal)
2.5 kW, Ultra Stable, Oil-Dielectric RF Termination Load
2.5 kW
DC to 28 MHz @ 1.1 max.
VSWR less than 1.05:1
50 (nominal)
5 kW, Ultra Stable, Oil-Dielectric RF Termination Load
5 kW
DC to 28 MHz @ 1.1 max.
VSWR less than 1.05:1
50 (nominal)
10 kW, Ultra Stable, Oil-Dielectric RF Termination Load
10 kW, 115 V
DC to 28 MHz @ 1.1 max.
VSWR less than 1.05:1
50 (nominal)
10 kW, Ultra Stable, Oil-Dielectric RF Termination Load
10 kW, 230 V
DC to 28 MHz @ 1.1 max.
VSWR less than 1.05:1
50 (nominal)
Oil-Dielectric RF Termination Load
15 KW
DC to 20 MHz at 1.15:1 max
50 (nominal)